合金靶材
合金靶材是由两种或多种金属元素按特定比例合成的溅射靶材,广泛应用于半导体、光学镀膜、磁存储、平板显示和新能源等高科技领域。与单一金属靶材相比,合金靶材能够提供更丰富的薄膜性能,如优化的电导率、磁性、耐腐蚀性及机械强度,满足不同工艺和应用需求。
我们提供多种高纯度合金靶材,包括铝铜(AlCu)、钛铝(TiAl)、钴镍(CoNi)、铱锰(IrMn)、镍铬(NiCr)等,覆盖从微电子制造到光学涂层的多种应用。通过精密的粉末冶金、熔炼或热压烧结工艺,我们的合金靶材具备均匀的成分分布和优异的致密性,确保稳定的溅射沉积效果。
我们的合金靶材具有高纯度、均匀的成分分布和优异的机械性能,能够满足高端薄膜沉积应用的严格要求。采用先进的冶金工艺,在显微结构上具备极佳的致密性,确保溅射过程中的稳定性和均匀性。同时,合金靶材具备优异的耐腐蚀性和高温稳定性,能够适应复杂工艺环境,提升薄膜的性能表现。
针对不同应用需求,我们可提供多种合金配比及尺寸定制服务,广泛适用于半导体制造、光学镀膜、磁存储、触控显示和新能源等行业,为精密制造和科技创新提供可靠的材料支持。
合金靶材产品列表:
| 名称 | 化学式 | 纯度 |
| 银铬 | Ag/Cr | 4N |
| 银铜 | Ag/Cu | 4N-5N |
| 银铜铟 | Ag/Cu/In | 4N-5N |
| 银铜镍 | Ag/Cu/Ni | 4N-5N |
| 银铜钯 | Ag/Cu/Pd | 4N-5N |
| 银铜锌 | Ag/Cu/Zn | 4N-5N |
| 银钯 | Ag/Pd | 4N-5N |
| 银锡 | Ag/Sn | 3N-4N |
| 铝银 | Al/Ag | 3N-4N |
| 铝钙 | Al/Ca | 3N-5N |
| 铝铈 | Al/Ce | 3N-3N5 |
| 铝铬 | Al/Cr | 2N5-4N |
| 铝铬钴铁镍 | Al/Cr/Co/Fe/Ni | 4N |
| 铝铬钛钒 | Al/Cr/Ti/V | 3N |
| 铝铜 | Al/Cu | 3N-5N |
| 铝镝 | Al/Dy | 2N-5N |
| 铝铒 | Al/Er | 2N-5N |
| 铝镓 | Al/Ga | 3N-4N |
| 铝钆 | Al/Gd | 2N-5N |
| 铝铪 | Al/Hf | 3N-5N |
| 铝锂 | Al/Li | 2N5-4N |
| 铝镁 | Al/Mg | 3N-4N5 |
| 铝镁钪 | Al/Mg/Sc | 3N-4N |
| 铝镁硅 | Al/Mg/Si | 3N-4N |
| 铝锰 | Al/Mn | 3N5-4N |
| 铝钼 | Al/Mo | 3N-4N |
| 铝铌 | Al/Nb | 3N-4N5 |
| 铝铌钛锆 | Al/Nb/Ti/Zr | 3N |
| 铝钕 | Al/Nd | 2N-5N |
| 铝钪 | Al/Sc | 3N-4N |
| 铝硅 | Al/Si | 3N-5N |
| 铝硅铜 | Al/Si/Cu | 3N-5N |
| 铝锡铜 | Al/Sn/Cu | 2N-4N |
| 铝锶 | Al/Sr | 3N-4N |
| 铝钒 | Al/V | 3N-4N |
| 铝钇 | Al/Y | 3N-4N |
| 铝钇镍 | Al/Y/Ni | 3N |
| 金银 | Au/Ag | 4N-5N |
| 金银铜 | Au/Ag/Cu | 4N-5N |
| 金铜 | Au/Cu | 4N-5N |
| 金锗 | Au/Ge | 4N-5N |
| 金锗镍 | Au/Ge/Ni | 4N-5N |
| 金镍 | Au/Ni | 4N-5N |
| 金钯 | Au/Pd | 4N-5N |
| 金铂 | Au/Pt | 4N-5N |
| 金锑 | Au/Sb | 4N-5N |
| 金硅 | Au/Si | 4N-5N |
| 金锡 | Au/Sn | 4N-5N |
| 金锌 | Au/Zn | 4N-5N |
| 铈钆 | Ce/Gd | 2N-5N |
| 铈镁 | Ce/Mg | 3N |
| 铈钐 | Ce/Sm | 2N-5N |
| 钴铬 | Co/Cr | 3N-4N |
| 钴铬钼 | Co/Cr/Mo | 3N-4N |
| 钴铬镍 | Co/Cr/Ni | 2N5-4N |
| 钴铬钨 | Co/Cr/W | 3N-4N |
| 钴铁 | Co/Fe | 2N5-4N |
| 钴铁硼 | Co/Fe/B | 3N-4N |
| 钴铁钽硼 | Co/Fe/Ta/B | 3N |
| 钴镍 | Co/Ni | 2N5-4N |
| 钴镍铬钼 | Co/Ni/Cr/Mo | 3N |
| 钴钽锆 | Co/Ta/Zr | 3N-3N5 |
| 铬锑 | Cr/Sb | 4N |
| 铬硅 | Cr/Si | 2N8-4N |
| 铬钒 | Cr/V | 3N-4N |
| 铜钴 | Cu/Co | 3N-3N5 |
| 铜铬 | Cu/Cr | 2N5-4N |
| 铜镓 | Cu/Ga | 3N5-5N |
| 铜铟 | Cu/In | 3N-5N |
| 铜铟镓 | Cu/In/Ga | 3N5-5N |
| 铜锰 | Cu/Mn | 3N-4N |
| 铜镍 | Cu/Ni | 2N5-4N |
| 铜镍铟 | Cu/Ni/In | 4N |
| 铜镍锡 | Cu/Ni/Sn | 3N |
| 铜镍钛 | Cu/Ni/Ti | 3N-4N |
| 铜锡 | Cu/Sn | 3N-4N |
| 铜锶 | Cu/Sr | 3N5 |
| 铜钛 | Cu/Ti | 3N-4N |
| 铜钒 | Cu/V | 3N5 |
| 铜钇 | Cu/Y | 3N5 |
| 铜锌 | Cu/Zn | 3N-4N |
| 铜锆 | Cu/Zr | 2N5-3N5 |
| 碘化亚铜 | CuI | 4N |
| 铁铝 | Fe/Al | 3N-4N |
| 铁钴铬镍锰 | Fe/Co/Cr/Ni/Mn | 3N |
| 铁钴钽 | Fe/Co/Ta | 3N-4N |
| 铁钴钽锆 | Fe/Co/Ta/Zr | 3N-4N |
| 铁铬 | Fe/Cr | 3N-4N |
| 铁铬铝 | Fe/Cr/Al | 3N-5N |
| 铁铬钒 | Fe/Cr/V | 3N |
| 铁镓 | Fe/Ga | 3N-4N |
| 铁锗 | Fe/Ge | 3N-3N5 |
| 铁铪 | Fe/Hf | 3N-4N |
| 铁镁 | Fe/Mg | 3N-4N |
| 铁锰 | Fe/Mn | 3N-4N |
| 铁钼 | Fe/Mo | 3N-4N |
| 铁锑 | Fe/Sb | 3N |
| 铁硅 | Fe/Si | 3N-4N |
| 铁钒锑 | Fe/V/Sb | 3N |
| 镓铟 | Ga/In | 4N |
| 镓铟锡 | Ga/In/Sn | 4N |
| 镓锑 | Ga/Sb | 4N |
| 铟铋锡 | In/Bi/Sn | 4N |
| 铟锑 | In/Sb | 4N |
| 铟锡 | In/Sn | 3N-4N |
| 铱锰 | Ir/Mn | 3N-3N5 |
| 铱铼 | Ir/Re | 3N5 |
| 铱锡 | Ir/Sn | 4N |
| 镁锌钙 | Mg/Zn/Ca | 3N-3N5 |
| 锰镓 | Mn/Ga | 3N |
| 钼铜 | Mo/Cu | 3N-4N |
| 钼镧 | Mo/La | 3N-3N5 |
| 钼铌 | Mo/Nb | 3N5 |
| 钼铼 | Mo/Re | 3N5 |
| 钼钽 | Mo/Ta | 3N5 |
| 钼锆钛 | Mo/Zr/Ti | 3N-3N5 |
| 镍铝 | Ni/Al | 2N5-4N |
| 镍钴铁钛 | Ni/Co/Fe/Ti | 3N |
| 镍铬 | Ni/Cr | 2N-4N |
| 镍铬铝硅 | Ni/Cr/Al/Si | 2N5-4N |
| 镍铬铜 | Ni/Cr/Cu | 2N5-4N |
| 镍铬铁 | Ni/Cr/Fe | 3N-4N |
| 镍铬硅 | Ni/Cr/Si | 3N-4N |
| 镍铜锰 | Ni/Cu/Mn | 3N-4N |
| 镍铜钛 | Ni/Cu/Ti | 2N-4N |
| 镍铁 | Ni/Fe | 2N5-4N |
| 镍铁钴 | Ni/Fe/Co | 3N-4N |
| 镍铁钼 | Ni/Fe/Mo | 3N |
| 镍镧 | Ni/La | 2N-5N |
| 镍镁 | Ni/Mg | 3N-4N |
| 镍锰 | Ni/Mn | 3N-4N |
| 镍钼 | Ni/Mo | 3N-4N |
| 镍铌钛 | Ni/Nb/Ti | 2N5-3N |
| 镍铂 | Ni/Pt | 3N-5N |
| 镍钛 | Ni/Ti | 3N-4N |
| 镍钒 | Ni/V | 3N-4N |
| 镍钨 | Ni/W | 3N-4N |
| 钐钴 | Sm/Co | 2N-5N |
| 钽铝 | Ta/Al | 3N-4N |
| 铽镝铁 | Tb/Dy/Fe | 2N-5N |
| 铽铁 | Tb/Fe | 3N |
| 钛铝 | Ti/Al | 2N7-4N |
| 钛铝硅 | Ti/Al/Si | 2N5-3N5 |
| 钛铬 | Ti/Cr | 2N5-4N |
| 钛铌 | Ti/Nb | 3N-3N5 |
| 钛铌锆 | Ti/Nb/Zr | 3N-4N |
| 钛铌锆硅 | Ti/Nb/Zr/Si | 3N |
| 钛锑 | Ti/Sb | 3N |
| 钛锆铪铌 | Ti/Zr/Hf/Nb | 3N |
| 钨铼 | W/Re | 3N-4N |
| 钨钛 | W/Ti | 3N-4N5 |
| 锌铝 | Zn/Al | 3N-4N |
| 锌镁 | Zn/Mg | 3N-3N5 |
| 锌锑 | Zn/Sb | 4N |
| 锌锡 | Zn/Sn | 3N-4N |
| 锆铝 | Zr/Al | 2N-4N |
| 锆铁 | Zr/Fe | 2N-4N |
| 锆铌 | Zr/Nb | 2N5-4N |
| 锆铌钽钛 | Zr/Nb/Ta/Ti | 3N |
| 锆镍 | Zr/Ni | 2N5-4N |
| 锆钛 | Zr/Ti | 2N5-4N |
| 锆钇 | Zr/Y | 2N-5N |
| 高熵合金定制 | HEA | 纯度定制 |