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合金靶材

       合金靶材是由两种或多种金属元素按特定比例合成的溅射靶材,广泛应用于半导体、光学镀膜、磁存储、平板显示和新能源等高科技领域。与单一金属靶材相比,合金靶材能够提供更丰富的薄膜性能,如优化的电导率、磁性、耐腐蚀性及机械强度,满足不同工艺和应用需求。
       我们提供多种高纯度合金靶材,包括铝铜(AlCu)、钛铝(TiAl)、钴镍(CoNi)、铱锰(IrMn)、镍铬(NiCr)等,覆盖从微电子制造到光学涂层的多种应用。通过精密的粉末冶金、熔炼或热压烧结工艺,我们的合金靶材具备均匀的成分分布和优异的致密性,确保稳定的溅射沉积效果。
       我们的合金靶材具有高纯度、均匀的成分分布和优异的机械性能,能够满足高端薄膜沉积应用的严格要求。采用先进的冶金工艺,在显微结构上具备极佳的致密性,确保溅射过程中的稳定性和均匀性。同时,合金靶材具备优异的耐腐蚀性和高温稳定性,能够适应复杂工艺环境,提升薄膜的性能表现。
       针对不同应用需求,我们可提供多种合金配比及尺寸定制服务,广泛适用于半导体制造、光学镀膜、磁存储、触控显示和新能源等行业,为精密制造和科技创新提供可靠的材料支持。

 

合金靶材产品列表:

名称 化学式 纯度
银铬 Ag/Cr 4N
银铜 Ag/Cu 4N-5N
银铜铟 Ag/Cu/In 4N-5N
银铜镍 Ag/Cu/Ni 4N-5N
银铜钯 Ag/Cu/Pd 4N-5N
银铜锌 Ag/Cu/Zn 4N-5N
银钯 Ag/Pd 4N-5N
银锡 Ag/Sn 3N-4N
铝银 Al/Ag 3N-4N
铝钙 Al/Ca 3N-5N
铝铈 Al/Ce 3N-3N5
铝铬 Al/Cr 2N5-4N
铝铬钴铁镍 Al/Cr/Co/Fe/Ni 4N
铝铬钛钒 Al/Cr/Ti/V 3N
铝铜 Al/Cu 3N-5N
铝镝 Al/Dy 2N-5N
铝铒 Al/Er 2N-5N
铝镓 Al/Ga 3N-4N
铝钆 Al/Gd 2N-5N
铝铪 Al/Hf 3N-5N
铝锂 Al/Li 2N5-4N
铝镁 Al/Mg 3N-4N5
铝镁钪 Al/Mg/Sc 3N-4N
铝镁硅 Al/Mg/Si 3N-4N
铝锰 Al/Mn 3N5-4N
铝钼 Al/Mo 3N-4N
铝铌 Al/Nb 3N-4N5
铝铌钛锆 Al/Nb/Ti/Zr 3N
铝钕 Al/Nd 2N-5N
铝钪 Al/Sc 3N-4N
铝硅 Al/Si 3N-5N
铝硅铜 Al/Si/Cu 3N-5N
铝锡铜 Al/Sn/Cu 2N-4N
铝锶 Al/Sr 3N-4N
铝钒 Al/V 3N-4N
铝钇 Al/Y 3N-4N
铝钇镍 Al/Y/Ni 3N
金银 Au/Ag 4N-5N
金银铜 Au/Ag/Cu 4N-5N
金铜 Au/Cu 4N-5N
金锗 Au/Ge 4N-5N
金锗镍 Au/Ge/Ni 4N-5N
金镍 Au/Ni 4N-5N
金钯 Au/Pd 4N-5N
金铂 Au/Pt 4N-5N
金锑 Au/Sb 4N-5N
金硅 Au/Si 4N-5N
金锡 Au/Sn 4N-5N
金锌 Au/Zn 4N-5N
铈钆 Ce/Gd 2N-5N
铈镁 Ce/Mg 3N
铈钐 Ce/Sm 2N-5N
钴铬 Co/Cr 3N-4N
钴铬钼 Co/Cr/Mo 3N-4N
钴铬镍 Co/Cr/Ni 2N5-4N
钴铬钨 Co/Cr/W 3N-4N
钴铁 Co/Fe 2N5-4N
钴铁硼 Co/Fe/B 3N-4N
钴铁钽硼 Co/Fe/Ta/B 3N
钴镍 Co/Ni 2N5-4N
钴镍铬钼 Co/Ni/Cr/Mo 3N
钴钽锆 Co/Ta/Zr 3N-3N5
铬锑 Cr/Sb 4N
铬硅 Cr/Si 2N8-4N
铬钒 Cr/V 3N-4N
铜钴 Cu/Co 3N-3N5
铜铬 Cu/Cr 2N5-4N
铜镓 Cu/Ga 3N5-5N
铜铟 Cu/In 3N-5N
铜铟镓 Cu/In/Ga 3N5-5N
铜锰 Cu/Mn 3N-4N
铜镍 Cu/Ni 2N5-4N
铜镍铟 Cu/Ni/In 4N
铜镍锡 Cu/Ni/Sn 3N
铜镍钛 Cu/Ni/Ti 3N-4N
铜锡 Cu/Sn 3N-4N
铜锶 Cu/Sr 3N5
铜钛 Cu/Ti 3N-4N
铜钒 Cu/V 3N5
铜钇 Cu/Y 3N5
铜锌 Cu/Zn 3N-4N
铜锆 Cu/Zr 2N5-3N5
碘化亚铜 CuI 4N
铁铝 Fe/Al 3N-4N
铁钴铬镍锰 Fe/Co/Cr/Ni/Mn 3N
铁钴钽 Fe/Co/Ta 3N-4N
铁钴钽锆 Fe/Co/Ta/Zr 3N-4N
铁铬 Fe/Cr 3N-4N
铁铬铝 Fe/Cr/Al 3N-5N
铁铬钒 Fe/Cr/V 3N
铁镓 Fe/Ga 3N-4N
铁锗 Fe/Ge 3N-3N5
铁铪 Fe/Hf 3N-4N
铁镁 Fe/Mg 3N-4N
铁锰 Fe/Mn 3N-4N
铁钼 Fe/Mo 3N-4N
铁锑 Fe/Sb 3N
铁硅 Fe/Si 3N-4N
铁钒锑 Fe/V/Sb 3N
镓铟 Ga/In 4N
镓铟锡 Ga/In/Sn 4N
镓锑 Ga/Sb 4N
铟铋锡 In/Bi/Sn 4N
铟锑 In/Sb 4N
铟锡 In/Sn 3N-4N
铱锰 Ir/Mn 3N-3N5
铱铼 Ir/Re 3N5
铱锡 Ir/Sn 4N
镁锌钙 Mg/Zn/Ca 3N-3N5
锰镓 Mn/Ga 3N
钼铜 Mo/Cu 3N-4N
钼镧 Mo/La 3N-3N5
钼铌 Mo/Nb 3N5
钼铼 Mo/Re 3N5
钼钽 Mo/Ta 3N5
钼锆钛 Mo/Zr/Ti 3N-3N5
镍铝 Ni/Al 2N5-4N
镍钴铁钛 Ni/Co/Fe/Ti 3N
镍铬 Ni/Cr 2N-4N
镍铬铝硅 Ni/Cr/Al/Si 2N5-4N
镍铬铜 Ni/Cr/Cu 2N5-4N
镍铬铁 Ni/Cr/Fe 3N-4N
镍铬硅 Ni/Cr/Si 3N-4N
镍铜锰 Ni/Cu/Mn 3N-4N
镍铜钛 Ni/Cu/Ti 2N-4N
镍铁 Ni/Fe 2N5-4N
镍铁钴 Ni/Fe/Co 3N-4N
镍铁钼 Ni/Fe/Mo 3N
镍镧 Ni/La 2N-5N
镍镁 Ni/Mg 3N-4N
镍锰 Ni/Mn 3N-4N
镍钼 Ni/Mo 3N-4N
镍铌钛 Ni/Nb/Ti 2N5-3N
镍铂 Ni/Pt 3N-5N
镍钛 Ni/Ti 3N-4N
镍钒 Ni/V 3N-4N
镍钨 Ni/W 3N-4N
钐钴 Sm/Co 2N-5N
钽铝 Ta/Al 3N-4N
铽镝铁 Tb/Dy/Fe 2N-5N
铽铁 Tb/Fe 3N
钛铝 Ti/Al 2N7-4N
钛铝硅 Ti/Al/Si 2N5-3N5
钛铬 Ti/Cr 2N5-4N
钛铌 Ti/Nb 3N-3N5
钛铌锆 Ti/Nb/Zr 3N-4N
钛铌锆硅 Ti/Nb/Zr/Si 3N
钛锑 Ti/Sb 3N
钛锆铪铌 Ti/Zr/Hf/Nb 3N
钨铼 W/Re 3N-4N
钨钛 W/Ti 3N-4N5
锌铝 Zn/Al 3N-4N
锌镁 Zn/Mg 3N-3N5
锌锑 Zn/Sb 4N
锌锡 Zn/Sn 3N-4N
锆铝 Zr/Al 2N-4N
锆铁 Zr/Fe 2N-4N
锆铌 Zr/Nb 2N5-4N
锆铌钽钛 Zr/Nb/Ta/Ti 3N
锆镍 Zr/Ni 2N5-4N
锆钛 Zr/Ti 2N5-4N
锆钇 Zr/Y 2N-5N
高熵合金定制 HEA 纯度定制